Assessment of Cleanroom Suitability for Automated Equipment by Dynamic Particle Emission
ISO 14644-14
To prevent the risk of particle generation during equipment operation from contaminating the product, ISO 14644 establishes testing guildline not only for cleanroom environments but also for equipment used in cleanrooms.
ISO 14644-14 introduces a methodology to assess the suitability of equipment, based on airborne particle cleanliness, for entering or being use in cleanrooms and associated controlled environments.
Once equipment generates particles due to heat or friction, or when electrostatic effects cause particle attraction after use, these particle contaminants can directly pollute the product and even the process environment.