Can You Be Sure Your Equipment Is Contamination-Free?

Contamination Sources from Cleanroom Equipment

• Mechanical Wear

• Material Degradation

• Maintenance, Servicing & Handling contamination

• Chemical Residues & Outgassing

• Process Liquid or Gas Leakage

• Electrostatic Attraction

• Other Cleanroom Equipment

• Inadequate Cleaning

Why Dynamic Particle Emission Testing?

Dynamic Particle Emission Testing evaluates the quantity and size distribution of airborne particles generated during equipment operation or movement. The test assesses particle emission characteristics and verifies equipment suitability for specific cleanroom classifications. Compared with static testing, dynamic testing better reflects real production environments and provides more representative results for equipment qualification and contamination risk control.

ISO 14644-14 Assessment of suitability for equipment by airborne particle concentration

Test Procedure:

1. Define Test Requirements

2. Visual Inspection

3. Test Planning

4. Particle Measurement

5. Data Analysis & Classification

6. Suitability Declaration

Equipment Available for Testing：

• Semiconductor Process Equipment

• Robotic Systems : Wafer Handling, Probe and Automation Robot

• Packaging & Assembly Equipment

• Material Handling Equipment : AGV, AMR, Trolley, Conveyor System

• Inspection & Metrology Equipment

• Tools & Fixtures

• Other Cleanroom Equipment : Pharmaceutical Aseptic, Optoelectronic Manufacturing, Storage Systems

SGS Cleanroom Equipment Testing Services

SGS offers dynamic particle emission testing in accordance with ISO 14644-14, including customized simulation testing, equipment suitability assessments, and professional reporting services. These solutions help manufacturers verify equipment cleanliness performance, control contamination risks, and maintain product quality in controlled environments.

Contact Us

📧 semi.cs.tw@sgs.com
☎ +886 2 2299 3279 #7132–7134